Enhancement of measurement accuracy of optical stereo deflectometry based on imaging model analysis-Reference-Cited by-同舟云学术

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Enhancement of measurement accuracy of optical stereo deflectometry based on imaging model analysis

Published:2018-12 Issue: Volume:111 Page:1-7
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Xu Yongjia,Gao Feng,Jiang Xiangqian

Funder

Engineering and Physical Sciences Research Council

EPSRC

Horizon 2020

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Simple, flexible calibration of phase calculation-based three-dimensional imaging system;Zhang;Opt Lett,2011

2. Review of single-shot 3D shape measurement by phase calculation-based fringe projection techniques;Zhang;Opt Eng,2012

3. A surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry;Zhang;Opt Express,2017

4. Towards a traceable probe calibration method for white light interference based AFM;Yang;Precis Eng,2018

5. A novel 3D stitching method for WLI based large range surface topography measurement;Lei;Opt Commun,2016

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