Author:
Su Fei,Zhang Bowen,Li Tenghui
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Theory, technology and applications of piezoresistive sensors: a review;Fiorillo;Sensors and Actuators A: Physical,2018
2. Failure resistance of amorphous silicon transistors under extreme in-plane strain;Gleskova;Appl Phys Lett,1999
3. Near Infrared Photoelasticity of Polycrystalline Silicon and it’s Relation to In-Plane Residual Stresses;He,2005
4. Comparison of phase shifting techniques for measuring in-plane residual stress in thin, flat silicon wafers;Prasath;Journal of Electronic Materials,2013
5. Development of an infrared polarized microscope for evaluation of high gradient stress with a small distribution area on a silicon chip;Su;Review of Scientific Instruments,2019
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献