Author:
Zhang Defu,Li Pengzhi,Xu Wei,Li Zongxuan,Jin Guang,Zhang Jianguo
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Optical lithography: here is why;Lin,2010
2. Principles of lithography;Levinson,2010
3. EUV lithography;Bakshi,2009
4. International technology roadmap for semiconductors 2015 edition. http://www.semiconductors.org/main/2015_international_technology_roadmap_for_semiconductors_itrs/
5. Active optical alignment of off-axis telescopes based on nodal aberration theory;Zhang;Opt. Express,2016
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