Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference44 articles.
1. Micro and nano-structuration of silicon by femtosecond laser: application to silicon photovoltaic cells fabrication;Halbwax;Thin Solid Films,2008
2. Liu X. Industrial applications of ultrahigh precision short-pulse laser processing (invited paper). Photon processing in microelectronics and photonics iv, vol. 5713, San Jose, CA, USA: SPIE; 2005, pp. 372–386.
3. Microstructuring with femtosecond lasers;Nolte;Adv Eng Mater,2000
4. Laser-solid interaction in the femtosecond time regime;Von der Linde;Appl Surf Sci,1997
5. Liu X., Du D., Mourou G. Laser ablation and micromachining with ultrashort laser pulses. IEEE, J Quant Electron 10.1109/3.631270 1997;33:1706–1716.
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献