Fabricating of aspheric micro-lens array by excimer laser micromachining

Author:

Chiu Chi-Cheng,Lee Yung-Chun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Technique for monolithic fabrication of microlens array;Popvic;Appl Opt,1998

2. Photolytic for producing microlens in photosensitive glass;Nicholas;Appl Opt,1985

3. Dry etching for coherent refractive microlens array;Stern;Opt Eng,1994

4. Microjet fabrication of microlens array;Macfarlane;IEEE Photo Technol Lett,1994

5. Flexible fabrication of microlenses in layers with excimer laser ablation;Naessens;Appl Surf,2003

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