Surface roughness characterization of Al-doped zinc oxide thin films using rapid optical measurement
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Influence of sputtering conditions on the properties of aluminum-doped zinc oxide thin film fabricated using a facing target sputtering system;Thin Solid Films;2020-06
4. Effect of rotationally moving surface on roughness measurement of sputtered Pt film with close-loop correction using adaptive optics;Optik;2016-02
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