Fourier-attention network: A deep neural network for lithographic misalignment sensing-Reference-Cited by-同舟云学术

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Fourier-attention network: A deep neural network for lithographic misalignment sensing

Published:2024-05 Issue: Volume:176 Page:108054
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Wang Nan^ORCID,Li Yi,Jiang Wei,Qin Zhen'an,Liu Jun

Publisher

Elsevier BV

Reference17 articles.

1. Three-dimensional integration of nanotechnologies for computing and data storage on a single chip;Shulaker;Nature,2017

2. Photonic chips made easier;Bourzac;Nature,2012

3. Quantum computation with universal error mitigation on a superconducting quantum processor;Song;Sci Adv,2011

4. Measurement of the Earth tides with a MEMS gravimeter;Middlemiss;Nature,2016

5. High-resolution electroluminescent imaging of pressure distribution using a piezoelectric nanowire LED array;Pan;Nat Photonics,2013

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