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[INVITED] On the mechanisms of single-pulse laser-induced backside wet etching

  • Published:2017-02 Issue: Volume:88 Page:17-23
  • ISSN:0030-3992
  • Container-title:Optics & Laser Technology
  • language:en
  • Short-container-title:Optics & Laser Technology

Author:

Tsvetkov M.Yu.,Yusupov V.I.,Minaev N.V.,Akovantseva A.A.,Timashev P.S.,Golant K.M.,Chichkov B.N.,Bagratashvili V.N.

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference38 articles.

1. Fundamentals of Laser Micromachining;Schaeffer,2012

2. Laser Processing of Engineering Materials: Principles, Procedure and Industrial Application;Ion,2005

3. Advances in Laser Materials Processing: Technology, Research and Applications,2010

4. Laser Processing and Chemistry;Bäuerle,2011

5. Laser micromachining of glass, silicon, and ceramics;Rihakova;Adv. Mater. Sci. Eng.,2015

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