Efficient fabrication of high-quality hybrid periodic nanostructures on 4H-SiC using a single-step vector femtosecond laser processing
-
Published:2024-12
Issue:
Volume:179
Page:111363
-
ISSN:0030-3992
-
Container-title:Optics & Laser Technology
-
language:en
-
Short-container-title:Optics & Laser Technology
Author:
Li Yi-En,
Kuo Jia-Fan,
Cheng Chung-WeiORCID,
Lee An-ChenORCID