High quality nanogratings far beyond diffraction limits on silicon efficiently fabricated using femtosecond laser dual-beam interference direct writing
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Published:2025-02
Issue:
Volume:181
Page:111505
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ISSN:0030-3992
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Container-title:Optics & Laser Technology
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language:en
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Short-container-title:Optics & Laser Technology
Author:
Li Kang,
Han RuozhongORCID,
Suo Mengqi,
Long Mingquan,
Chen Long,
Cao KaiqiangORCID,
Zhang Shian,
Feng Donghai,
Jia Tianqing,
Sun Zhenrong,
Xu Hongxing