Author:
Gale Michael T.,Gimkiewicz Christiane,Obi Samuel,Schnieper Marc,Söchtig Jürgen,Thiele Hans,Westenhöfer Susanne
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. Gale MT, Replication technology for micro-optics and optical microsystems. Proc SPIE 5177-15. 2003.
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