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Multi-colour microscopic interferometry for optical metrology and imaging applications

  • Published:2016-09 Issue: Volume:84 Page:10-25
  • ISSN:0143-8166
  • Container-title:Optics and Lasers in Engineering
  • language:en
  • Short-container-title:Optics and Lasers in Engineering

Author:

Upputuri Paul Kumar,Pramanik Manojit,Nandigana Krishna Mohan,Kothiyal Mahendra Prasad

Funder

Ministry of Education in Singapore

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference105 articles.

1. Optical shop testing;Malacara,2007

2. Optical inspection of microsystems;Osten,2006

3. Applied optics fundamentals and device applications: nano, moems, and biotechnology;Mentzer,2011

4. Measurement of static and vibrating microsystems using microscopic TV holography;Paul Kumar;Opt Int J Light Electron Opt,2011

5. Microoptics and nanooptics fabrication;Kemme,2009
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