Correction of a coherent image during KrF excimer laser ablation using a mask projection

Author:

Shin Dong Sig,Lee Jae Hoon,Suh Jeong,Kim To Hoon

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Rapid prototype fabrication of smooth microreactor channel systems in PMMA by VUV laser ablation at 157nm for applications in genome analysis and biotechnology;Lapezyna;Mater Res Soc Symp Proc,1998

2. European firms take the lead in high-precision micromachining applications;Kincade;Laser Focus World,2003

3. Excimer laser fabrication of polymer microfluidic devices;Kim;J Laser Appl,2003

4. Fundamentals of microfabrication;Macdou,1997

5. Excimer laser induced ablation has frequently been dealt with in Lambda Physik Highlights;Srinvansan;J Polym Sci: Polym Chem Ed 22,1984

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