Removal mechanisms of micro-scale particles by surface wave in laser cleaning
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Laser-assisted micron scale particle removal;Imen;Appl Phys Lett,1991
2. Efficient pulsed laser removal of 0.2μm sized particle from a solid surface;Zapka;Appl Phys Lett,1991
3. Laser-cleaning techniques for removal of surface particulates;Tam;J Appl Phys,1992
4. Shock wave analysis of laser assisted particle removal;Imen;J Appl Phys,1993
5. A thermal detachment mechanism for particle removal from surfaces by pulsed laser irradiation;Kelley;Microelectron Eng,1993
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