1. Diffraction order control in overlay metrology: a review of the roadmap options;Mike;Proc SPIE,2008
2. Accuracy of diffraction-based and image-based overlay;Chih-Ming;Proc SPIE,2011
3. Diffraction based overlay and image based overlay on production flow for advanced technology node;Yoann;Proc SPIE,2013
4. Overlay improvements using a real time machine learning algorithm;Emil;Proc SPIE,2014
5. Matching between simulations and measurements as a key driver for reliable overlay target design;Lozenko;Proc SPIE,2018