Deposition of platinum from Pt(PF3)4 on atomically clean platinum surfaces
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Reference13 articles.
1. A highly efficient source for vapor deposition of platinum
2. Chemical Vapor Deposition of Thin-Film Platinum
3. D.C. Shaver, S.P. Doran, M. Rothschild and H.C. Sedlacek, SPIE Sym. Proc., in press.
4. T. Baum and P.B. Comita, unpublished results.
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1. Deposition of Highly Porous Nanocrystalline Platinum on Functionalized Substrates Through Fluorine-Induced Decomposition of Pt(PF3 )4 Adsorbates;Particle & Particle Systems Characterization;2013-06-05
2. P-Donor LigandsBased in part on the article P-Donor Ligands by Charles A. McAuliffe & Anthony G. Mackie which appeared in theEncyclopedia of Inorganic Chemistry, First Edition.;Encyclopedia of Inorganic and Bioinorganic Chemistry;2011-12-15
3. Low-Energy Electron-Induced Decomposition and Reactions of Adsorbed Tetrakis(trifluorophosphine)platinum [Pt(PF3)4];The Journal of Physical Chemistry C;2011-08-17
4. P-Donor LigandsBased in part on the article P-Donor Ligands by Charles A. McAuliffe & Anthony G. Mackie which appeared in theEncyclopedia of Inorganic Chemistry, First Edition.;Encyclopedia of Inorganic Chemistry;2006-03-15
5. Electron beam induced deposition of low resistivity platinum from Pt(PF[sub 3])[sub 4];Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
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