Reoxidation of silicon substrates during the sputter deposition of oxidic thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference13 articles.
1. Superconducting Y1Ba2Cu3O7−xfilms on Si
2. High critical currents in strained epitaxial YBa2Cu3O7−δon Si
3. Crystalline Qualities and Critical Current Densities of As-Grown Ba2YCu3OxThin Films on Silicon with Buffer Layers
4. Buffer layers for high-quality epitaxial YBCO films on Si
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