Development and Uncertainty Analysis of an Automatic Testing System for Diffusion Pump Performance

Author:

Zhang S.W.,Liang W.S.,Zhang Z.J.

Publisher

Elsevier BV

Subject

General Engineering

Reference13 articles.

1. Measurement the pumping speed of rough vacuum pumps: conventional stationary method vs intermittent pump-down method (new standard DIN 28432)[J];Jitschin;Vacuum,1996

2. ISO 1608. Vapour vacuum pump-Measurement of performance characteristics[S], second edition, 1993.

3. Recommended procedure for measuring pumping speeds[J];Hablanian;Journal of vacuum science and technology. A,1987

4. ISO, Guide to the Expression of Uncertainty in Measurement[S], first edition, 1993;.

5. Uncertainty analysis of the high vacuum part of the orifice-flow-type pressure standard[J];Peksaa;Vacuum,2004

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