Picosecond Laser Patterning of ITO Thin Films

Author:

Risch Anna,Hellmann Ralf

Publisher

Elsevier BV

Subject

General Engineering

Reference18 articles.

1. Effects of wavelengths on processing indium tin oxide thin films using diode pumped Nd:YLF laser;Tanaka;In: Proceedings of SPIE,2003

2. Laser direct patterning of indium tin oxide layer for plasma display panel bus electrode;Kim;In: Japanese Journal of Applied Physics,2007

3. A study on removal of shoulders at laser ablated indium tin oxide film edge;Kim;In: Japanese Journal of Applied Physics,2008

4. High-speed maskless patterning of thin films for giant microelectronics;Yavas;In: Japanese Journal of Applied Physics,1999

5. Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films;Yavas;In: Journal of Applied Physics,1999

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