Formation of Periodic Nanoripples on Silicon and Germanium Induced by Femtosecond Laser Pulses

Author:

Le Harzic R.,Dörr D.,Sauer D.,Neumeier M.,Epple M.,Zimmermann H.,Stracke F.

Publisher

Elsevier BV

Subject

General Engineering

Reference16 articles.

1. Laser-induced periodic surface structure. I. Theory;Sipe;In: Phys. Rev. B,1983

2. Surface ripples on silicon and gallium arsenide under picosecond laser illumination;Fauchet;In: Appl. Phys. Lett.,1982

3. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses;Bonse;In: J. Appl. Phys.,2009

4. Surface nanostructuring of silicon;Pedraza;In: Appl. Phys. A,2003

5. Patterning of silicon – Differences between ns and fs laser pulses;Weingärtner;In: Appl. Surf. Sci.,1999

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