On the Concentration Unsteadiness of Chemical Vapour Deposition with a Precursor Sublimated from Packed Bed of Solid Source. Problems with Multicomponent Coatings

Author:

Peev Georgi,Tsibranska Irene

Publisher

Elsevier BV

Subject

General Engineering

Reference17 articles.

1. Numerical Analysis of Mass Transfer in Packed-Bed Reactors with Irregular Particle Arrangements;Atmakidis;Chemical Engineering Science,2012

2. Torsion Effusion Vapour Pressure Determinations of Os, Rh, Ru, W, Co and Cr Solid Carbonyls;Chandra;Journal of Physics and Chemistry of Solids,2005

3. Assessment of Vapour Pressure data of Solid Metal Carbonyls;Chellappa;Journal of Chemical Thermodynamics,2005

4. Chiu, W., Jaluria , Y., Glumac, N., 2000. “Control of thin film growth in chemical, vapor deposition manufacturing systems”, ASME National Heat Transfer Conference. Pittsburgh, PA, 2000., paper # 12157.

5. Gas Dispersion in Packed Beds;Edwards;Chemical Engineering Science,1968

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