Design and Fabrication of Piezoresistive Based Encapsulated Poly-Si Cantilevers for Bio/chemical Sensing

Author:

Krishna N.P. Vamsi,Murthy T.R. Srinivasa,Reddy K. Jayaprakash,Sangeeth K.,Hegde G.M.

Publisher

Elsevier BV

Subject

General Engineering

Reference12 articles.

1. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterization and Development of Novel Read-out Methods;Maria Nordström;Sensors,2008

2. Micromechanical cantilever-based biosensors, Sens. Actuators B;Raiteri;Chem.,2001

3. J. Fritz et al. , Translating biomolecular recognition into nanomechanics, Science, vol. 288, no. 5464, pp. 316-318, (2000).

4. J. Thaysen, Cantilever for biochemical sensing integrated in a micro liquid handling system, Ph.D. dissertation, Tech. Univ. Denmark, Copenhagen, Denmark, (2001).

5. H. Jensinius et al. , A microcantilever-based alcohol vapor sensor application and response model, Appl. Phys. Lett., vol. 76, no. 18, p. 2615, (2000).

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