Gas Flow Sputtered Thick Layers of Columnar Lead Zirconate Titanate on Silicon Wafers for High Frequency Ultrasound Transducers
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference7 articles.
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3. PZT thin films for piezoelectric microactuator applications;Kueppers;Sens. Actuators A,2002
4. High-rate low kinetic energy gas-flow-sputtering system;Ishii;J. Vac. Sci. Technol. A,1989
5. Development of a piezoelectric lead titanate thin film process on silicon substrates by high rate gas flow sputtering;Jacobsen;Sens. Actuators A,2007
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Novel fabrication of PZT thick films by an oil-bath based hydrothermal method;Ceramics International;2017-08
2. Very high frequency ultrasound beamformer for biomedical applications and non-destructive testing;2015 IEEE International Ultrasonics Symposium (IUS);2015-10
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