Multifunctional X-ray Lithography Station at VEPP-3
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Published:2016
Issue:
Volume:84
Page:205-212
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ISSN:1875-3892
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Container-title:Physics Procedia
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language:en
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Short-container-title:Physics Procedia
Author:
Goldenberg B.G.,Lemzyakov A.G.,Nazmov V.P.,Pindyurin V.F.
Subject
General Engineering
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