Fabrication of MEMS Platform for Sensors Applications by Laser Micro Engraving-Reference-Cited by-同舟云学术

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Fabrication of MEMS Platform for Sensors Applications by Laser Micro Engraving

Published:2015 Issue: Volume:72 Page:475-479
ISSN:1875-3892
Container-title:Physics Procedia
language:en
Short-container-title:Physics Procedia

Author:

Oblov Konstantin,Ivanova Anastasia,Soloviev Sergey,Samotaev Nikolay,Vasiliev Alexey,Sokolov Andrey

Publisher

Elsevier BV

Subject

General Engineering

Reference14 articles.

1. Simon, I., Barsan, N., Bauer, M., Weimar, U., 2001. Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sensors and Actuators B: Chemical 73, 1-26.

2. Briand, D., Courbat, J., 2013. Micromachined semiconductor gas sensors. Semiconductor Gas Sensors, 220-260.

3. Teterycz, H., Kita, J., Bauer, R., Golonka, L.J., Licznerski, B.W., Nitsch, K., Wiśniewski, K., 1998. New design of an SnO2 gas sensor on low temperature cofiring ceramics. Sensors and Actuators B: Chemical 47, 100-103.

4. Kita, J., Dziedzic, A., Golonka, L.J., Bochenek, A., 2000. Properties of laser cut LTCC heaters. Microelectronics Reliability 40, 1005-1010.

5. Rettig, F., Moos, R., 2004. Ceramic meso hot-plates for gas sensors. Sensors and Actuators B: Chemical 103, 91-97.

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1. Laser beam micro engraving on silicon carbide;Materials and Manufacturing Processes;2020-06-10

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