Influence of sputtering power on the structural and morphological properties of semiconducting Mg2Si films
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference14 articles.
1. Semiconducting Properties ofMg2Si Single Crystals
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3. Semiconducting Silicides;Borisenko,2000
4. Synthesis and sintering of Mg2Si thermoelectric generator by spark plasma sintering
5. The thermoelectric properties of bulk crystalline n- and p-type Mg2Si prepared by the vertical Bridgman method
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3. Radio frequency power induced changes of structural, morphological, optical and electrical properties of sputtered cadmium oxide thin films;Thin Solid Films;2018-05
4. Electrical properties of Mg2Si thin films on flexible polyimide substrates fabricated by radio-frequency magnetron sputtering;Journal of the Ceramic Society of Japan;2015
5. Growth of magnesium silicide thin films on Si(100), Si(111) and SOI substrates during rapid thermal processing;Intermetallics;2013-01
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