Hard antireflecting PECVD silicon nitride coatings on polycrystalline germanium
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Antireflection Coatings for Germanium and Silicon in the Infrared*
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3. Current Trends in Crystal Growth and Characterization;Kishore,1991
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5. PECVD grown silicon nitride AR coatings on polycrystalline silicon solar cells
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1. Hard antireflective films of SiAlON for zinc sulfide in 3–5μm regions;Infrared Physics & Technology;2013-09
2. Surface characterization and properties of silicon nitride films prepared by ion-assisted deposition;Surface and Coatings Technology;2010-07
3. Characterization of ‘ARE’ deposited silicon nitride films and their feasibility as antireflection coating;Surface and Coatings Technology;2005-12
4. Wet-Chemical Treatment of Si[sub 3]N[sub 4] Surfaces Studied Using Infrared Attenuated Total Reflection Spectroscopy;Journal of The Electrochemical Society;2005
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