Environmental and health risk analysis of nitrogen trifluoride (NF3), a toxic and potent greenhouse gas-Reference-Cited by-同舟云学术

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Environmental and health risk analysis of nitrogen trifluoride (NF3), a toxic and potent greenhouse gas

Published:2008-11 Issue:2-3 Volume:159 Page:257-263
ISSN:0304-3894
Container-title:Journal of Hazardous Materials
language:en
Short-container-title:Journal of Hazardous Materials

Author:

Tsai Wen-Tien

Publisher

Elsevier BV

Subject

Health, Toxicology and Mutagenesis,Pollution,Waste Management and Disposal,Environmental Chemistry,Environmental Engineering

Reference47 articles.

1. Feed gas purity and environmental concerns in plasma etching;Flamm;Solid State Technol.,1993

2. Integrated circuits;Sawchyn,1995

3. Nitrogen trifluoride—a new dry etchant gas;Woytek;Solid State Technol.,1984

4. A review of plasma etching applications using nitrogen trifluoride;Barkanic;Solid State Technol.,1989

5. Electrochemical synthesis and application of NF3;Tasaka;J. Fluorine Chem.,2007

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