Author:
Chao Mu-Rong,Chen Jian-Lian
Subject
Health, Toxicology and Mutagenesis,Pollution,Waste Management and Disposal,Environmental Chemistry,Environmental Engineering
Reference20 articles.
1. Future Trends in Microelectronics: The Nano Millennium;Luryi,2002
2. Cramming more components onto integrated circuits;Moore;Electronics,1965
3. The 1.7 kilogram microchip: energy and material use in the production of semiconductor devices;Williams;Environ. Sci. Technol.,2002
4. International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, 2003.
5. Utilization of critical fluids in processing semiconductors and their related materials;King;Curr. Opin. Solid State Mater. Sci.,2003
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献