Environmental and health risks of chlorine trifluoride (ClF3), an alternative to potent greenhouse gases in the semiconductor industry-Reference-Cited by-同舟云学术

Environmental and health risks of chlorine trifluoride (ClF3), an alternative to potent greenhouse gases in the semiconductor industry

Published:2011-06 Issue:1-3 Volume:190 Page:1-7
ISSN:0304-3894
Container-title:Journal of Hazardous Materials
language:en
Short-container-title:Journal of Hazardous Materials

Author:

Tsai Wen-Tien

Publisher

Elsevier BV

Subject

Health, Toxicology and Mutagenesis,Pollution,Waste Management and Disposal,Environmental Chemistry,Environmental Engineering

Reference37 articles.

1. Halogen fluorides;Bailey,2005

2. FTIR spectroscopy for the analysis of selected exhaust gas flows in silicon technology;Guber;J. Mol. Struct.,1995

3. Safe usage of ClF3: supply, vacuum service, and exhaust gas management;Pierce;Solid State Technol.,1997

4. Properties and reactivity of chlorine trifluoride;Gugliemini;Semicond. Int.,1999

5. An evaluation of safety issues surrounding the use of chlorine trifluoride for in-situ chamber cleaning of low pressure chemical vapor deposition (LPCVD) systems;Joseph;Semicond. Safety Assoc. J.,1999

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