A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production-Reference-Cited by-同舟云学术

A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

Published:2013-01 Issue:1 Volume:53 Page:90-96
ISSN:0041-624X
Container-title:Ultrasonics
language:en
Short-container-title:Ultrasonics

Author:

Hara Motoaki,Ueda Masanori,Satoh Yoshio

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference16 articles.

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4. T. Nishihara, T. Yokoyama, T. Miyashita, Y. Satoh, High performance and miniature thin film bulk acoustic wave filters for 5GHz, in: Proc. Int. Ultrason. Symp., Munich, 2002, pp. 969–972.

5. Super-high-frequency band filters configured with air-gap-type thin-film bulk acoustic resonators;Hara;Jpn. J. Appl. Phys.,2010

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