Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices-Reference-Cited by-同舟云学术

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Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices

Published:2021-08 Issue: Volume:115 Page:106460
ISSN:0041-624X
Container-title:Ultrasonics
language:en
Short-container-title:Ultrasonics

Author:

Shen Junyao,Fu Sulei,Su Rongxuan,Xu Huiping,Wang Weibiao,Lu Zengtian,Feng Qiong,Zeng Fei,Song Cheng,Pan Feng

Funder

China Postdoctoral Science Foundation

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference47 articles.

1. Acoustic wave filter technology–a review;Ruppel;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2017

2. A novel optimal sensitivity design scheme for yarn tension sensor using surface acoustic wave device;Lei;Ultrasonics,2014

3. The complexity of surface acoustic wave fields used for microfluidic applications;Wesera;Ultrasonics,2020

4. Wavenumber domain analysis of surface acoustic wave scattering from localized gratings on layered piezoelectric substrate;Zhang;Ultrasonics,2018

5. Inversion of surface damage and residual stress in ground silicon wafers by laser surface acoustic wave technology;Liu;Ultrasonics,2021

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1. Deposition and structural investigation of uniform AlN(100) films at wafer scale through RF magnetron sputtering;Ceramics International;2024-08

2. Design of heterostructure one-port SAW resonator with improved bandwidth using Si and LiNbO ₃ layer;Ferroelectrics;2023-10-26

3. Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer;Micromachines;2023-08-30

4. GaN surface acoustic wave filter with low insertion loss;Ultrasonics;2023-07

5. Energy Harvest in Ferromagnet‐Embedded Surface Acoustic Wave Devices;Advanced Electronic Materials;2022-08-29

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