Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference8 articles.
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4. Investigation for the operation of an integrated peristaltic micropump;Husband;J. Micromech. Microeng.,2004
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1. Development of a Compact, Reliable, and Electrostatically Actuated Device for Microfluidic-Based Active Glasses;Eurosensors 2023;2024-03-14
2. Numerical Investigation of a MEMS Thermal Actuator Performance by Modifying its Geometric Dimensions;Procedia Manufacturing;2019
3. Phase transition induced micromechanical actuation in VO2 coated cantilever;Journal of Applied Physics;2018-08-21
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