Total Angle-Resolved Scattering: Characterization of Microlens Mold Surface

Author:

Hayashi T.,Michihata M.,Takaya Y.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference6 articles.

1. Suzuki H, Sunao K, Tomoaki N, Tsutomu O, Katsuo S, et al., Precision Grinding of Aspherical CVD-SiC Molding Die, International Journal of The Japan Society for Precision Engineering 1998; 32(1):25-30.(in Japanese).

2. Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties;Elson;Applied Optics,1983

3. Size determination of microscratches on silicon oxide wafer surface using scattered light;Ha;Precision Engineering,2003

4. Beckman P, The scattering of electromagnetic waves from rough surfaces, Pergamon Press; 1963, p. 30.

5. Surface roughness measurements of low-scatter mirrors and roughness standards;Guenther;Applied Optics,1984

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