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The effect of thermoelastic damping on the total Q-factor of stateof-the-art MEMS gyroscopes with complex beam-like suspensions

  • Published:2010 Issue: Volume:5 Page:1296-1299
  • ISSN:1877-7058
  • Container-title:Procedia Engineering
  • language:en
  • Short-container-title:Procedia Engineering

Author:

Künzig T.,Niessner M.,Wachutka G.,Schrag G.,Hammer H.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference9 articles.

1. Energy loss in MEMS resonators and the impact on inertial and RF devices;Weinberg;Transducers,2009

2. Temperature dependence of quality factor in MEMS resonators;Kim;J. Micro. Sys.,2008

3. COMSOL. Thermoelastic Damping in a MEMS Resonator. COMSOL Multiphysics Tutorial 2008.

4. Engineering MEMS resonators with low thermoelastic damping;Duwel;J. Micro. Sys.,2006

5. A thermal-energy method for calculating thermoelastic damping in micromechanical resonators;Hao;J. Sound and Vibration,2009

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