Design and Modeling of a Flexible Contact-Mode Piezoresistive Detector for Time-Based Acceleration Sensing

Author:

Rajaraman V.,Hau B.S.,Rocha L.A.,French P.J.,Makinwa K.A.A.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference9 articles.

1. H. Yang, et al. A Novel Operation Mode for Accelerometers, Proc. Pacific Rim Workshop on Transducers and Micro/Nano Technologies, Xiamen, China, 2002.

2. L.A. Rocha, Dynamics and Nonlinearities of the Electro-mechanical Coupling in Inertial MEMS, PhD Dissertation, Delft University of Technology (TU Delft), Delft, The Netherlands, 2005.

3. V. Rajaraman, et al. A Thin-SOI Micromachined Quasi-Digital Accelerometer, Proc. Eurosensors XXII Conf., Dresden, Germany, 2008.

4. H. Yang, et al. Design of a Vertical Surrounding Gate JFET for Capacitive Sensing Based on SOI-MEMS Technology, Report, State Key Laboratory of Transducer Technology, SIMIT, Shanghai, PR China (unpublished).

5. L.A. Rocha, et al. A Time Based micro-G Accelerometer, Proc. Eurosensors XXII Conf., Dresden, Germany, 2008.

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