Strain sensing on steel surfaces using vacuum packaged MEMS resonators-Reference-Cited by-同舟云学术

Strain sensing on steel surfaces using vacuum packaged MEMS resonators

Published:2010 Issue: Volume:5 Page:1426-1429
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Ferri M.,Mancarell F.,Belsito L.,Roncaglia A.,Yan J.,Seshia A.A.,Soga K.,Zalesky J.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference6 articles.

1. K.E. Wojciechowski, B.E. Boser, A.P. Pisano, A MEMS resonant strain sensor operated in air, Proceedings of MEMS 2004 (2004), p. 841–845.

2. A. Pisano, MEMS and Nano Technology for the Handheld, Portable Electronic and the Automotive Markets, Transducers & Eurosensors’07 Proceedings, Lyon, France, June 10-14 (2007), p. 1–4.

3. R.G. Azevedo, W. Huang, O.M. O’Reilly, A.P. Pisano, Dual-mode temperature compensation for a comb-driven MEMS resonant strain gauge, Sensors and Actuators A: Physical 144 (2008), p. 374–380.

4. D.R. Myers, A.P. Pisano, Torque measurements of an automotive halfshaft utilizing a MEMS resonant strain gauge, Technical Digest of TRANSDUCERS 2009 - the 15th International Conference on Solid State Sensors, Actuators ans Microsystems (2009), p. 1726–1729.

5. M. Ferri, F. Mancarella, J. Yan, J. Ransley, A.A. Seshia, A. Roncaglia, Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique, Proceedings of IEEE Sensors 2008, Lecce, Oct. 26-29 (2008), p. 1131–1134.

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