Relationship between Surface Cracks and Distribution of Crystalline Silicon Grains in RF-Sputtered β-FeSi2 Films
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Published:2016
Issue:
Volume:139
Page:112-116
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ISSN:1877-7058
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Container-title:Procedia Engineering
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language:en
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Short-container-title:Procedia Engineering
Author:
Uematsu T.,Nakamura K.
Subject
Applied Mathematics