Modeling of Capacitive MEMS Microphone with Square Membrane or Plate Using Integral Method

Author:

Honzík P.,Guianvarc’h C.,Bruneau M.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference11 articles.

1. Silicon Microphones;Sessler:;Journal of Audio Engineering Society,1996

2. Theoretical response of condenser microphones;Zuckerwar;J. Acoust. Soc. Am.,1978

3. Analytical Modeling of Electrostatic Transducers in Gases: Behavior of Their Membrane and Sensitivity;Lavergne;Acta Acust. united Ac.,2014

4. A Model for Rectangular Miniaturized Microphones;Bruneau;Acta Acustica,1995

5. On the modelling of clamped plates loaded by a squeeze fluid film: application to miniaturised sensors;Le Van Suu;Acta Acust. united Ac.,2010

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