A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming-Reference-Cited by-同舟云学术

A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming

Published:2015 Issue: Volume:120 Page:206-209
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Walser S.,Siegel C.,Winter M.,Rocca G.,Leidl A.,Feiertag G.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference9 articles.

1. Silicon microphones;Sessler;J. Audio Eng. Soc.,1996

2. Capacitive MEMS microphones;Elko;Bell Labs Technical Journal,2005

3. Dual-microphone noise reduction for mobile phone application, in: Proceedings of International Acoustic, Speech and Signal Processing, Vancouver;Fu;Canada, May,2013

4. Design of a poly silicon MEMS microphone for high signal-to-noise ratio, in: Proceedings of Solid-State Device Research Conference, Bucharest;Dehe;Romania, September,2013

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review;Micromachines;2023-04-14

2. A Kirigami MEMS Velocity Acoustic Transducer;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20

3. On the use of acoustic methods for the detection of electrostatic capture of diaphragm in capacitive MEMS microphones;IEEE Transactions on Components, Packaging and Manufacturing Technology;2021

4. Acoustic methods for detection of specific failure modes in capacitive MEMS microphones;2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC);2020-09-15

5. Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask;Microelectronic Engineering;2019-02