Electret-based Out-Of-Plane Micro Energy Harvester with Parylene-C Serving as the Electret and Spring Material-Reference-Cited by-同舟云学术

Electret-based Out-Of-Plane Micro Energy Harvester with Parylene-C Serving as the Electret and Spring Material

Published:2015 Issue: Volume:120 Page:341-344
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Genter S.,Langhof T.,Paul O.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference7 articles.

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3. A Sandwiched-Structured MEMS Electret Power Generator for Multi-Directional Vibration Energy Harvesting;Tao;Dig. Tech. Papers Transducers, Anchorage,2015

4. A Miniature Harvester of Vertical Vibratory Capacitive Type Achieving Several Tens Microwatt for Broad Frequency of 20-40 Hz;Takahashi;Dig. Tech. Papers Transducers, Barcelona,2012

5. Electrostatic Energy Harvesting Device with Out-of-plane Gap closing scheme;Wang;Dig. Tech. Papers Transducers, Barcelona,2013

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