Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography

Author:

Hou Bo-jie,Gao Jian-she,Li Xiao-qing,Zhou Yun-fei

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference6 articles.

1. Process of wafer stage and reticle stage for step-and-scan-lithography system[J];Liu Dan;Laser & Optoelectronics Progress,2003

2. The Development of Feedforward Plus PID controller for Linear Motor;Hou Bojie;Machine tool & hydraulics,2009

3. The internal model principle of control theory;Francis;Automatica,1976

4. Design of a repetitive controller: An application to the track-following servo system of optical disk drives;Doh;IEE Proceedings - Control Theory and Applications,2006

5. Repetitive control for the track-following servo system of an optical disk drive;Moon;IEEE Transactions on Control Systems Technology,1998

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