Effect of Squeeze Film Damping and AC Actuation Voltage on Pull-in Phenomenon of Electrostatically Actuated Microswitch-Reference-Cited by-同舟云学术

Effect of Squeeze Film Damping and AC Actuation Voltage on Pull-in Phenomenon of Electrostatically Actuated Microswitch

Published:2016 Issue: Volume:144 Page:891-899
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Harsha C. Sri,Prasanth C.S.R.,Pratiher Barun

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference10 articles.

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2. Effects of squeezed film damping on dynamic finite element analyses of MEMS;Keating;Proceedings of SPIE - The International Society for Optical Engineering,2001

3. Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime;Mol;J. Micromech. Microeng,2009

4. A compact squeeze-film model including inertia, compressibility, and rarefaction effects for perforated 3D MEMS structures;Mohite;J. Microelectromech. Syst.,2008

5. Squeeze film air damping in MEMS

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