Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
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1. Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids;Microsystem Technologies;2017-08-30
2. Mechanical and wear characteristics of a-C:H/Cr/AlN/Ti multilayer films deposited by PVD/PACVD;Surface and Coatings Technology;2017-06
3. Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids;Journal of Micromechanics and Microengineering;2015-09-15
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