High Frequency 1D Piezoelectric Resonant Microscanners with Large Displacements

Author:

Gu-Stoppel S.,Janes J.,Quenzer H.J.,Eisermann C.,Heinrich F.,Benecke W.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference4 articles.

1. High frequency torsional MEMS scanner for displays;Baran,2012

2. Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification;Gu-Stoppel;Micromachining and Microfabrication Process Technology XVIII,2013

3. Optimised piezoelectric PZT thin film production on 8″ silicon wafers for micromechanical applications;Kaden;Nanotech,2012

4. S. Gu-Stoppel, J. Janes, H.J. Quenzer, U. Hofmann, W. Benecke, Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors, MOEMS and Miniaturized Systems XIII, 897706 (7 March 2014), p. 897706, 2014.

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