Author:
Brenes A.,Juillard J.,Santos F. Vinci Dos,Bonnoit A.
Reference6 articles.
1. Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators;Lee;Sensors and Actuators A,2011
2. First Harmonic (2f) Characterisation of Resonant Frequency and Q-Factor of Micromechanical Transducers;Logeeswaran;Analog Integrated Circuits and Signal Processing,2003
3. Enhanced transduction methods for electrostatically driven MEMS resonators, Solid-State Sensors;Lin;Actuators and Microsystems Conference (TRANSDUCERS),2009
4. Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation;Muñoz-Gamarra;Frequency Control Symposium (FCS) IEEE International,2010
5. A new micromachined silicon high-accuracy pressure sensor;Mandle;Sensors and Actuators A,1995