1. Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics;Miller;SPIE,1993
2. The possibility of compensating astronomical seeing;Babcock;Publ. Astron. Soc. Pac.,1953
3. Micro-Electro-Mechanical Focusing Mirrors;Burns;Proc. MEMS’,1998
4. The membrane mirror as an adaptive optical element;Grosso;Journal of Optical Society of America,1977
5. 128×128 Deformable Mirroe Device.;Hornbeck;IEEE Trans. Electron Devices,1983