Single Langmuir Probe Measurements in an Unbalanced Magnetron Sputtering System
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference12 articles.
1. Roth JR. Industrial plasma engineering. Vol.1 principles. IOP Publishing Ltd; 1995.
2. Roth JR. Industrial plasma engineering. Vol.2 applications to non-thermal plasma processing. IOP Publishing Ltd; 2001.
3. Ion energy distribution in SiCl4 and Ar/O2 dry etching discharge;Hope;Vacuum,1993
4. Langmuir probe measurements in an asymmetrical RF discharge;Magdalena;Romanian Rep Phys,2005
5. Spectroscopic and electric probe measurements of plasma parameters in the negative glow region of helium discharge plasma;Abdel Baky;J Quant Spectrosc Ra,2000
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Tungsten Material Behavior under H2, D2, and He Plasma Interaction Conditions in the Framework of Fusion-Relevant Studies;Materials;2023-10-25
2. Langmuir Probe Technique to Measure Variation of Plasma Parameters with Magnetic Field;Acta Physica Polonica A;2021-10
3. Advanced Concepts and Architectures for Plasma-Enabled Material Processing;Synthesis Lectures on Emerging Engineering Technologies;2020-09-30
4. How to Control Plasma Parameters;Advanced Concepts and Architectures for Plasma-Enabled Material Processing;2020
5. Post-deposition annealing of thin RF magnetron sputter-deposited VO2 films above the melting point;Journal of Alloys and Compounds;2018-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3