Electron temperature measurements in a radio frequency gas discharge
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference15 articles.
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3. Floating Multiple Probe Systems for Plasma Measurements
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Comparison of two electrostatic probes—single and asymmetrical triple probes;Vacuum;1992-08
2. Measurements of time varying plasma potential, temperature, and density in a 13.56 MHz radio‐frequency discharge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1989-05
3. Pressure dependence of electron temperature using rf‐floated electrostatic probes in rf plasmas;Applied Physics Letters;1977-04
4. Some considerations on the microwave electrodeless discharge;Spectrochimica Acta Part B: Atomic Spectroscopy;1975-08
5. Structure of the Plasma Boundary Layer at a Conducting Sphere;Physics of Fluids;1971
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