Sputtering of copper by bombardment with ions of 5–25 keV
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference13 articles.
1. VII. On the electro-chemical polarity of gases
2. Electronic and Ionic Impact Phenomena;Massey,1952
3. A Mechanism for Sputtering in the High Vacuum Based upon the Theory of Neutron Cooling
4. Ionization Phenomena in Gases;Cassignol,1960
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